Product

MD40FE

MD40FE

MDA-400LJ

MDA-400LJ

MDA-400M

MDA-400M

MDA-400S

MDA-400S

MDA-600S

MDA-600S

Type Flood exposure module Fully manual (Mask Aligner) Fully manual (Mask Aligner) PC / PLC control Manual (Mask Aligner) PC control semi auto
Mask size 사양 설명 up to 5" x 5" up to 5" x 5" up to 7" x 7" up to 7" x 7"
Substrate size up to 2" (option 4") piece to 4" dia piece to 4" dia piece to 6" piece to 6"
UV lamp & Power 365nm UV LED UV-LED & power supply 350W & power supply 350W & power supply 350W & power supply
Uniform beam size 2" x 2" (option 4" x 4") 125mm dia 4.25" x 4.25" 6.25" x 6.25" 6.25" x 6.25"
Beam Uniformity <±3% <±3% <±5% <±5%
Beam wavelength 365nm Only 350 ~ 450nm 350 ~ 450nm 350 ~ 450nm
365nm Intensity ~20mW/cm2 ~30mW/cm2 ~25mW/cm2 ~25mW/cm2
Alignment accuracy 1um 1um 1um 1um
Process resolution 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ x,y,z & θ x,y,z & θ x,y,z & θ
Options etc. Anti-Vibration table
UV Intensity meter
etc.
Anti-Vibration table
IR BSA
UV Intensity meter
etc.
Anti-Vibration table
CCD BSA
UV Intensity meter
UV-LED(365nm) exposure module
etc.
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