TSP

Film type TSP aligner

Film type TSP aligner

Cell type TSP aligner

Cell type TSP aligner

Sample size 500 x 500 square 4 ~ 7” square
Alignment accuracy ± 1.5um ± 1.5um
Resolution L/S 5~8um (Aspect ratio below 1) L/S 5~8um (Aspect ratio below 1)
Beam Intensity < 20mW/cm2 @ Broad band) < 20mW/cm2 @ Broad band)
Beam Uniformity < 5% < 5%