Film type TSP aligner

  • Film type TSP aligner

  • ◦ Vision system
    - Microscope : Dual scope & CCD
Photo-litho / Mask Aligner / TSP - Film type TSP aligner
  • 사양
Sample size 500 x 500 square
Alignment accuracy ± 1.5um
Resolution L/S 5~8um (Aspect ratio below 1)
Beam Intensity < 20mW/cm2 @ Broad band)
Beam Uniformity < 5%
◦ Vision system
- Microscope : Dual scope & CCD
목록으로