UV-LED

MDA-400LJ

MDA-400LJ

Type Fully manual (Mask Aligner)
Mask size up to 5" x 5"
Substrate size piece to 4"
UV lamp & Power UV-LED & power supply
Uniform beam size 4.25" x 4.25"
Beam Uniformity 365nm Only
365nm Intensity ~20mW/cm2
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ
Options etc.