Coating

SPIN-4000A

SPIN-4000A

Spin-1200D

Spin-1200D

Spin-3000D

Spin-3000D

Spin-3000A

Spin-3000A

Spin-5000A, 7000A

Spin-5000A, 7000A

Spin-1200T

Spin-1200T

Spin-3000T

Spin-3000T

Type Spin coater system Spin coater system Spin coater system Spin coater system Spin coater system Spin system Spin coater system
Substrate size piece ~ up to 12" circle piece ~ up to 4" circle piece ~ up to 6" circle piece ~ up to 8" circle piece ~ up to 12" circle / 500x500mm piece ~ up to 4" circle piece ~ up to 8" circle
Rotation speed Max. 3,000 rpm
AC Servo Motor
300 ~ 7,000rpm(@without load) an error of less than 3%
DC Servo Motor
300 ~ 7,000rpm(@without load) an error of less than 3%
DC Servo Motor
300 ~ 7,000rpm(@without load) an error of less than 1%
AC Servo Motor
300 ~ 5,000rpm / ~ 2,000rpm (@without load), Error rate ≤1%
AC Servo Motor
300 ~ 7,000rpm(@without load) an error of less than 3%
DC Servo Motor
300 ~ 7,000rpm(@without load) an error of less than 1%
DC Servo Motor
Spin state 20steps, 20recipes (digital type) 50steps, 20recipes (digital type) 50steps, 20recipes (digital type) 50steps, 20recipes (digital type) 50steps, 20recipes (digital type) 50steps, 50recipes (digital type) 50steps, 20recipes (digital type)
Acceleration / Deceleration rate Variable Variable Variable Variable Variable Variable Variable
Chuck material Anodized AL Anodized AL, Acetal Anodized AL, Acetal Anodized AL, Acetal Anodized AL, Acetal Anodized AL, Acetal Anodized AL, Acetal
Electric power 220V, 5A 220V, 5A 220V, 5A 220V, 5A 220V, 5A / 10A 220V, 5A 220V, 5A
Oilless vacuum pump pressure -650mmHg -650mmHg
Dimensions(mm) 650(W) x 945(D) x 1200(H) 230(W)x340(D)x260(H) 390(W)x570(D)x280(H) 390(W)x570(D)x400(H) Customized 230(W)x340(D)x260(H)
Options Number of Dispenser nozzle Number of Dispenser nozzle
Type of chemical
Drain type
etc.
Number of Dispenser nozzle
Type of chemical
Drain type
etc.
Bowl size 8", P.P 12", Stainless steel 12", Stainless steel 8", P.P 12", Stainless steel
Oiless vacuum pump pressure -650mmHg -650mmHg -650mmHg -650mmHg 650mmHg
Bowl Stainless steel / Stainless steel, Chuck cover type
Option Separated Controller