Spin-5000A, 7000A

  • Spin-5000A, 7000A

  • Programmable Recipe management
    Easy operation
    Adopt Drain, Exhaust hole in bowl
Photo-litho / Spin Coater / Coating - Spin-5000A, 7000A
  • 사양
Type Spin coater system
Substrate size piece ~ up to 12" circle / 500x500mm
Rotation speed 300 ~ 5,000rpm / ~ 2,000rpm (@without load), Error rate ≤1%
AC Servo Motor
Spin state 50steps, 20recipes (digital type)
Bowl Stainless steel / Stainless steel, Chuck cover type
Acceleration / Deceleration rate Variable
Chuck material Anodized AL, Acetal
Electric power 220V, 5A / 10A
Oilless vacuum pump pressure -650mmHg
Dimensions(mm) Customized
Options Number of Dispenser nozzle
Type of chemical
Drain type
etc.
Programmable Recipe management
Easy operation
Adopt Drain, Exhaust hole in bowl
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