Spin-1200T

  • Spin-1200T

  • Touch panel control
    Compact unit for various coating solutions
    PC Recipe management
    Easy operation
Photo-litho / Spin Coater / Coating - Spin-1200T
  • 사양
Type Spin system
Substrate size piece ~ up to 4" circle
Rotation speed 300 ~ 7,000rpm(@without load) an error of less than 3%
DC Servo Motor
Spin state 50steps, 50recipes (digital type)
Bowl size 8", P.P
Acceleration / Deceleration rate Variable
Chuck material Anodized AL, Acetal
Electric power 220V, 5A
Oiless vacuum pump pressure -650mmHg
Dimensions(mm) 230(W)x340(D)x260(H)
Option Separated Controller
Touch panel control
Compact unit for various coating solutions
PC Recipe management
Easy operation
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