Spin-3000T

  • Spin-3000T

  • Touch panel control
    Compact unit for various coating solutions
    PC Recipe management
    Easy operation
    Adopt Drain, Exhaust hole in bowl
Photo-litho / Spin Coater / Coating - Spin-3000T
  • 사양
Type Spin coater system
Substrate size piece ~ up to 8" circle
Rotation speed 300 ~ 7,000rpm(@without load) an error of less than 1%
DC Servo Motor
Spin state 50steps, 20recipes (digital type)
Bowl size 12", Stainless steel
Acceleration / Deceleration rate Variable
Chuck material Anodized AL, Acetal
Electric power 220V, 5A
Oiless vacuum pump pressure 650mmHg
Options Number of Dispenser nozzle
Type of chemical
Drain type
etc.
Touch panel control
Compact unit for various coating solutions
PC Recipe management
Easy operation
Adopt Drain, Exhaust hole in bowl
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