SPIN-4000A

  • SPIN-4000A

  • Touch panel control
    Easy operation
    Adopt Drain, Exhaust hole in bowl
Photo-litho / Spin Coater / Coating - SPIN-4000A
  • 사양
Type Spin coater system
Substrate size piece ~ up to 12" circle
Rotation speed Max. 3,000 rpm
AC Servo Motor
Spin state 20steps, 20recipes (digital type)
Acceleration / Deceleration rate Variable
Chuck material Anodized AL
Electric power 220V, 5A
Oilless vacuum pump pressure -650mmHg
Dimensions(mm) 650(W) x 945(D) x 1200(H)
Options Number of Dispenser nozzle
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