Type	Spin coater system
Substrate size	piece ~ up to 8" circle
Rotation speed	300 ~ 7,000rpm(@without load) an error of less than 1%
	DC Servo Motor
Spin state	50steps, 20recipes (digital type)
Bowl size	12", Stainless steel
Acceleration / Deceleration rate	Variable
Chuck material	Anodized AL, Acetal
Electric power	220V, 5A
Oiless vacuum pump pressure	650mmHg
Options	Number of Dispenser nozzle
	Type of chemical
	Drain type
	etc.

Touch panel control
Compact unit for various coating solutions
PC Recipe management
Easy operation
Adopt Drain, Exhaust hole in bowl