Spin-3000T
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Spin-3000T
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Touch panel control
Compact unit for various coating solutions
PC Recipe management
Easy operation
Adopt Drain, Exhaust hole in bowl
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- 사양
Type | Spin coater system |
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Substrate size | piece ~ up to 8" circle |
Rotation speed | 300 ~ 7,000rpm(@without load) an error of less than 1% |
DC Servo Motor | |
Spin state | 50steps, 20recipes (digital type) |
Bowl size | 12", Stainless steel |
Acceleration / Deceleration rate | Variable |
Chuck material | Anodized AL, Acetal |
Electric power | 220V, 5A |
Oiless vacuum pump pressure | 650mmHg |
Options | Number of Dispenser nozzle |
Type of chemical | |
Drain type | |
etc. |
Touch panel control
Compact unit for various coating solutions
PC Recipe management
Easy operation
Adopt Drain, Exhaust hole in bowl
Compact unit for various coating solutions
PC Recipe management
Easy operation
Adopt Drain, Exhaust hole in bowl