SPIN-1000T

  • SPIN-1000T

  • Compact unit for various coating solutions
    Programmable Recipe management
    Easy operation
Photo-litho / Spin Coater / Coating - SPIN-1000T
  • 사양
Type Spin coater system
Substrate size piece ~ up to 4" circle
Rotation speed 300 ~ 6,000rpm(@without load) an error of less than 5%
DC Servo Motor
Spin state 50steps, 50recipes (digital type)
Bowl size 8", P.P
Acceleration / Deceleration rate Variable
Chuck material Anodized AL, Acetal
Electric power 220V, 5A
Oiless vacuum pump pressure -650mmHg
Dimensions(mm) 224(W)x267(D)x183(H)
Compact unit for various coating solutions
Programmable Recipe management
Easy operation
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