Manual

MDA-80MS

MDA-80MS

MD40FE

MD40FE

MDA-400LJ

MDA-400LJ

MDA-400M

MDA-400M

MDA-400S

MDA-400S

Type PC control semi auto Flood exposure module Fully manual (Mask Aligner) Fully manual (Mask Aligner) PC / PLC control Manual (Mask Aligner)
Mask size up to 9" x 9" 사양 설명 up to 5" x 5" up to 5" x 5" up to 7" x 7"
Substrate size piece to 8" up to 2" (option 4") piece to 4" dia piece to 4" dia piece to 6"
UV lamp & Power 1kW & power supply 365nm UV LED UV-LED & power supply 350W & power supply 350W & power supply
Uniform beam size 8.25" x 8.25" 2" x 2" (option 4" x 4") 125mm dia 4.25" x 4.25" 6.25" x 6.25"
Beam Uniformity <±4% <±3% <±3% <±5%
365nm Intensity ~25mW/cm2 ~20mW/cm2 ~30mW/cm2 ~25mW/cm2
Alignment accuracy 1um@1um PR thickness with vacuum contact 1um 1um 1um
Process mode Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ x,y,z & θ x,y,z & θ x,y,z & θ
Options Anti-Vibration table
CCD BSA
UV Intensity meter
etc.
etc. Anti-Vibration table
UV Intensity meter
etc.
Anti-Vibration table
IR BSA
UV Intensity meter
etc.
Beam wavelength 365nm Only 350 ~ 450nm 350 ~ 450nm
Process resolution 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact