Manual

MDA-150 (FM)

MDA-150

MDA-150 (M)

MDA-150 (M)

MDA-60MS

MDA-60MS

MDA-80MS

MDA-80MS

MDA-80SA

MDA-80SA

Type Fully manual Manual (Mask Aligner) PC control semi auto PC control semi auto Joystick control Semi-Auto (Mask Aligner)
Mask size up to 5" x 5" up to 7" x 7" up to 7" x 7" up to 9" x 9" up to 9" x 9"
Substrate size piece to 4" piece to 6" piece to 6" x 6" piece to diameter 8" piece to 8" x 8"
UV lamp & Power 350W & Digital power supply 500W, 1kW & Digital power supply 1kW & power supply 1kW & power supply 2kW & power supply
Uniform beam size 6.25" x 6.25" 6.25" x 6.25 7.25" x 7.25" 9.25" x 9.25" 10.25" x 10.25"
Beam Uniformity <±3% <±5% <±5% <±5% <±3~5%
Beam wavelength 350 ~ 450nm 350 ~ 450nm 350 ~ 450nm 350 ~ 450nm 350 ~ 450nm
365nm Intensity ~30mW/cm2 ~50mW/cm2 15 ~ 25mW/cm2 15 ~ 25mW/cm2 15 ~ 25mW/cm2
Alignment accuracy 1um 1um 1um 1um 1um
Process resolution 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ x,y,z & θ (motorized) x,y(Manual), z, θ (Motorized) x,y(Manual), z, θ (Motorized) x,y,z & θ (Motorized)
Options IR BSA
UV Intensity meter
etc.
CCD BSA CCD BSA
UV Intensity meter
etc.
CCD BSA
UV Intensity meter
etc.
CCD BSA
UV Intensity meter
etc.
Frame Anti vibration table Anti vibration table Anti-Vibration system
1|2|3