|
 MDA-600S |
 MDA-80SA |
 MDA-12SA |
 MDA-20000SA |
Type |
PC control semi auto |
Joystick control Semi-Auto (Mask Aligner) |
Joystick control Semi-Auto (Mask Aligner) |
Joystick control Semi-Auto (Mask Aligner) |
Mask size |
up to 7" x 7" |
up to 9" x 9" |
up to 13" x 13" |
up to 610 x 610 (User spec.) |
Substrate size |
piece to 6" |
piece to 8" x 8" |
piece to 12" x 12" |
500 x 500 (User spec.) |
UV lamp & Power |
350W & power supply |
2kW & power supply |
2kW & power supply 5kW & Power supply |
2kW & power supply 5kW & Power supply |
Uniform beam size |
6.25" x 6.25" |
10.25" x 10.25" |
13.25" x 13.25" |
600 x 600 (User spec.) |
Beam Uniformity |
<±4% |
<±3~5% |
<±5% |
<±7% |
Beam wavelength |
350 ~ 450nm |
350 ~ 450nm |
350 ~ 450nm |
350 ~ 450nm |
365nm Intensity |
~25mW/cm2 |
15 ~ 25mW/cm2 |
15 ~ 20mW/cm2 (2kW) 25 ~ 60mW/cm2 (5kW) |
• |
Alignment accuracy |
1um |
1um |
1um |
• |
Process resolution |
0.8um@1um PR thickness with vacuum contact |
1um@1um PR thickness with vacuum contact |
1um@1um PR thickness with vacuum contact |
• |
Process mode |
Soft, Hard, Vacuum contact & Proximity |
Soft, Hard, Vacuum contact & Proximity |
Soft, Hard, Vacuum contact & Proximity |
Soft, Hard contact & Proximity |
Substrate chuck moving |
x,y,z & θ |
x,y,z & θ (Motorized) |
x,y,z & θ (Motorized) |
x,y,z & θ (Motorized) |
Options |
Anti-Vibration table CCD BSA UV Intensity meter UV-LED(365nm) exposure module etc. |
CCD BSA UV Intensity meter etc. |
CCD BSA UV Intensity meter etc. |
UV Intensity meter etc. |
Frame |
• |
Anti-Vibration system |
Anti-Vibration system |
Anti-Vibration system |