Manual
| Type | Fully manual | Manual (Mask Aligner) | PC control semi auto | PC control semi auto | Joystick control Semi-Auto (Mask Aligner) |
| Mask size | up to 5" x 5" | up to 7" x 7" | up to 7" x 7" | up to 9" x 9" | up to 9" x 9" |
| Substrate size | piece to 4" | piece to 6" | piece to 6" x 6" | piece to diameter 8" | piece to 8" x 8" |
| UV lamp & Power | 350W & Digital power supply | 500W, 1kW & Digital power supply | 1kW & power supply | 1kW & power supply | 2kW & power supply |
| Uniform beam size | 6.25" x 6.25" | 6.25" x 6.25 | 7.25" x 7.25" | 9.25" x 9.25" | 10.25" x 10.25" |
| Beam Uniformity | <±3% | <±5% | <±5% | <±5% | <±3~5% |
| Beam wavelength | 350 ~ 450nm | 350 ~ 450nm | 350 ~ 450nm | 350 ~ 450nm | 350 ~ 450nm |
| 365nm Intensity | ~30mW/cm2 | ~50mW/cm2 | 15 ~ 25mW/cm2 | 15 ~ 25mW/cm2 | 15 ~ 25mW/cm2 |
| Alignment accuracy | 1um | 1um | 1um | 1um | 1um |
| Process resolution | 1um@1um PR thickness with vacuum contact | 1um@1um PR thickness with vacuum contact | 1um@1um PR thickness with vacuum contact | 1um@1um PR thickness with vacuum contact | 1um@1um PR thickness with vacuum contact |
| Process mode | Soft, Hard, Vacuum contact & Proximity | Soft, Hard, Vacuum contact & Proximity | Soft, Hard, Vacuum contact & Proximity | Soft, Hard, Vacuum contact & Proximity | Soft, Hard, Vacuum contact & Proximity |
| Substrate chuck moving | x,y,z & θ | x,y,z & θ (motorized) | x,y(Manual), z, θ (Motorized) | x,y(Manual), z, θ (Motorized) | x,y,z & θ (Motorized) |
| Options | IR BSA UV Intensity meter etc. |
CCD BSA | CCD BSA UV Intensity meter etc. |
CCD BSA UV Intensity meter etc. |
CCD BSA UV Intensity meter etc. |
| Frame | • | • | Anti vibration table | Anti vibration table | Anti-Vibration system |