Manual
| Type | PC control semi auto | Joystick control Semi-Auto (Mask Aligner) | Joystick control Semi-Auto (Mask Aligner) | Joystick control Semi-Auto (Mask Aligner) |
| Mask size | up to 7" x 7" | up to 9" x 9" | up to 13" x 13" | up to 610 x 610 (User spec.) |
| Substrate size | piece to 6" | piece to 8" x 8" | piece to 12" x 12" | 500 x 500 (User spec.) |
| UV lamp & Power | 350W & power supply | 2kW & power supply | 2kW & power supply 5kW & Power supply |
2kW & power supply 5kW & Power supply |
| Uniform beam size | 6.25" x 6.25" | 10.25" x 10.25" | 13.25" x 13.25" | 600 x 600 (User spec.) |
| Beam Uniformity | <±4% | <±3~5% | <±5% | <±7% |
| Beam wavelength | 350 ~ 450nm | 350 ~ 450nm | 350 ~ 450nm | 350 ~ 450nm |
| 365nm Intensity | ~25mW/cm2 | 15 ~ 25mW/cm2 | 15 ~ 20mW/cm2 (2kW) 25 ~ 60mW/cm2 (5kW) |
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| Alignment accuracy | 1um | 1um | 1um | • |
| Process resolution | 0.8um@1um PR thickness with vacuum contact | 1um@1um PR thickness with vacuum contact | 1um@1um PR thickness with vacuum contact | • |
| Process mode | Soft, Hard, Vacuum contact & Proximity | Soft, Hard, Vacuum contact & Proximity | Soft, Hard, Vacuum contact & Proximity | Soft, Hard contact & Proximity |
| Substrate chuck moving | x,y,z & θ | x,y,z & θ (Motorized) | x,y,z & θ (Motorized) | x,y,z & θ (Motorized) |
| Options | Anti-Vibration table CCD BSA UV Intensity meter UV-LED(365nm) exposure module etc. |
CCD BSA UV Intensity meter etc. |
CCD BSA UV Intensity meter etc. |
UV Intensity meter etc. |
| Frame | • | Anti-Vibration system | Anti-Vibration system | Anti-Vibration system |