Manual

MDA-12SA

MDA-12SA

MDA-20000SA

MDA-20000SA

Type Joystick control Semi-Auto (Mask Aligner) Joystick control Semi-Auto (Mask Aligner)
Mask size up to 13" x 13" up to 610 x 610 (User spec.)
Substrate size piece to 12" x 12" 500 x 500 (User spec.)
UV lamp & Power 2kW & power supply
5kW & Power supply
2kW & power supply
5kW & Power supply
Uniform beam size 13.25" x 13.25" 600 x 600 (User spec.)
Beam Uniformity <±5% <±7%
Beam wavelength 350 ~ 450nm 350 ~ 450nm
365nm Intensity 15 ~ 20mW/cm2 (2kW)
25 ~ 60mW/cm2 (5kW)
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity Soft, Hard contact & Proximity
Substrate chuck moving x,y,z & θ (Motorized) x,y,z & θ (Motorized)
Frame Anti-Vibration system Anti-Vibration system
Options CCD BSA
UV Intensity meter
etc.
UV Intensity meter
etc.
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