Auto

MDA-40FA

MDA-40FA

MDA-80FA

MDA-80FA

MDA-12FA

MDA-12FA

Type Full automatic (Mask Aligner) Full automatic (Mask Aligner) Full automatic (Mask Aligner)
Mask size up to 7"x7" up to 9" x 9" up to 14" x 14"
Substrate size up to 6" 8" 12" circle
UV lamp & Power 350W & power supply 2kW & power supply 5kW lamp & power supply
Uniform beam size 6.25" x 6.25" 10.25" x 10.25" 13.25" x 13.25"
Beam Uniformity <±3% <±5% <±5%
Beam wavelength 350 ~ 450nm 350 ~ 450nm 350 ~ 450nm
365nm Intensity ~25mW/cm2 ~25mW/cm2 25~60mW/cm2 (5kW)
Alignment accuracy 1um 1um 1um
Process resolution 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ (Motorized) x,y,z & θ (Motorized) x,y,z & θ (Motorized)
Pre-aligner ±50um ±50um ±50um
Frame Anti-Vibration system Anti-Vibration system Anti-Vibration system
Options UV Intensity meter
UV-LED(365nm) exposure module
etc.
UV Intensity meter
etc.
UV Intensity meter
etc.