MDA-80FA

  • MDA-80FA

  • MDA-80FA(Mask Aligner) 는 풀 오토 장비로 시료 사이즈 8” 의 양산 전용 모델로, 성능 대비 가격이 합리적이며, 주로 기업체의 양산라인 공정에 적합합니다.
Photo-litho / Mask Aligner / Auto - MDA-80FA
  • 사양
Type Full automatic (Mask Aligner)
Mask size up to 9" x 9"
Substrate size 8"
UV lamp & Power 2kW & power supply
Uniform beam size 10.25" x 10.25"
Beam Uniformity <±5%
Beam wavelength 350 ~ 450nm
365nm Intensity ~25mW/cm2
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ (Motorized)
Pre-aligner ±50um
Frame Anti-Vibration system
Options UV Intensity meter
etc.
Easy operation UI
PC Operation with PLC control
Image grab & Data log
More than 100 Program recipes
Microscope position control system
Auto Align mark searching function
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