• MDA-12FA

  • MDA-12FA(Mask Aligner) 는 풀 오토 장비로 시료 사이즈 12” 의 양산 전용 모델로, 성능 대비 가격이 합리적이며, 주로 기업체의 양산라인 공정에 적합합니다.
Photo-litho / Mask Aligner / Auto - MDA-12FA
  • 사양
Type Full automatic (Mask Aligner)
Mask size up to 14" x 14"
Substrate size 12" circle
UV lamp & Power 5kW lamp & power supply
Uniform beam size 13.25" x 13.25"
Beam Uniformity <±5%
Beam wavelength 350 ~ 450nm
365nm Intensity 25~60mW/cm2 (5kW)
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ (Motorized)
Pre-aligner ±50um
Frame Anti-Vibration system
Options UV Intensity meter
Easy operation UI
PC Operation with PLC control
Image grab & Data log
More than 100 Program recipes
Microscope position control system
Auto Align mark searching function