Product

MDA-80FA

MDA-80FA

MDA-12FA

MDA-12FA

Film type TSP aligner

Film type TSP aligner

Cell type TSP aligner

Cell type TSP aligner

MDA-400LJ

MDA-400LJ

Type Full automatic (Mask Aligner) Full automatic (Mask Aligner) Fully manual (Mask Aligner)
Mask size up to 9" x 9" up to 14" x 14" up to 5" x 5"
Substrate size 8" 12" circle piece to 4"
UV lamp & Power 2kW & power supply 5kW lamp & power supply UV-LED & power supply
Uniform beam size 10.25" x 10.25" 13.25" x 13.25" 4.25" x 4.25"
Beam Uniformity <±5% <±5% < 5% < 5% 365nm Only
Beam wavelength 350 ~ 450nm 350 ~ 450nm
365nm Intensity ~25mW/cm2 25~60mW/cm2 (5kW) ~20mW/cm2
Alignment accuracy 1um 1um ± 1.5um ± 1.5um 1um
Process resolution 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ (Motorized) x,y,z & θ (Motorized) x,y,z & θ
Pre-aligner ±50um ±50um
Frame Anti-Vibration system Anti-Vibration system
Options UV Intensity meter
etc.
UV Intensity meter
etc.
etc.
Sample size 500 x 500 square 4 ~ 7” square
Resolution L/S 5~8um (Aspect ratio below 1) L/S 5~8um (Aspect ratio below 1)
Beam Intensity < 20mW/cm2 @ Broad band) < 20mW/cm2 @ Broad band)
1|2|3|4|5