Product

MDA-12SA

MDA-12SA

MDA-20000SA

MDA-20000SA

MDA-40FA

MDA-40FA

MDA-80FA

MDA-80FA

MDA-12FA

MDA-12FA

Type Joystick control Semi-Auto (Mask Aligner) Joystick control Semi-Auto (Mask Aligner) Full automatic (Mask Aligner) Full automatic (Mask Aligner) Full automatic (Mask Aligner)
Mask size up to 13" x 13" up to 610 x 610 (User spec.) up to 7"x7" up to 9" x 9" up to 14" x 14"
Substrate size piece to 12" x 12" 500 x 500 (User spec.) up to 6" 8" 12" circle
UV lamp & Power 2kW & power supply
5kW & Power supply
2kW & power supply
5kW & Power supply
350W & power supply 2kW & power supply 5kW lamp & power supply
Uniform beam size 13.25" x 13.25" 600 x 600 (User spec.) 6.25" x 6.25" 10.25" x 10.25" 13.25" x 13.25"
Beam Uniformity <±5% <±7% <±3% <±5% <±5%
Beam wavelength 350 ~ 450nm 350 ~ 450nm 350 ~ 450nm 350 ~ 450nm 350 ~ 450nm
365nm Intensity 15 ~ 20mW/cm2 (2kW)
25 ~ 60mW/cm2 (5kW)
~25mW/cm2 ~25mW/cm2 25~60mW/cm2 (5kW)
Alignment accuracy 1um 1um 1um 1um
Process resolution 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity Soft, Hard contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ (Motorized) x,y,z & θ (Motorized) x,y,z & θ (Motorized) x,y,z & θ (Motorized) x,y,z & θ (Motorized)
Frame Anti-Vibration system Anti-Vibration system Anti-Vibration system Anti-Vibration system Anti-Vibration system
Options CCD BSA
UV Intensity meter
etc.
UV Intensity meter
etc.
UV Intensity meter
UV-LED(365nm) exposure module
etc.
UV Intensity meter
etc.
UV Intensity meter
etc.
Pre-aligner ±50um ±50um ±50um
1|2|3|4|5|6