Product

Film type TSP aligner

Film type TSP aligner

Cell type TSP aligner

Cell type TSP aligner

MDA-400LJ

MDA-400LJ

SPIN-1000T

SPIN-1000T

SPIN-4000A

SPIN-4000A

Sample size 500 x 500 square 4 ~ 7” square
Alignment accuracy ± 1.5um ± 1.5um 1um
Resolution L/S 5~8um (Aspect ratio below 1) L/S 5~8um (Aspect ratio below 1)
Beam Intensity < 20mW/cm2 @ Broad band) < 20mW/cm2 @ Broad band)
Beam Uniformity < 5% < 5% 365nm Only
Type Fully manual (Mask Aligner) Spin coater system Spin coater system
Mask size up to 5" x 5"
Substrate size piece to 4"
UV lamp & Power UV-LED & power supply
Uniform beam size 4.25" x 4.25"
365nm Intensity ~20mW/cm2
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ
Options etc. Number of Dispenser nozzle
Substrate size piece ~ up to 4" circle piece ~ up to 12" circle
Rotation speed 300 ~ 6,000rpm(@without load) an error of less than 5%
DC Servo Motor
Max. 3,000 rpm
AC Servo Motor
Spin state 50steps, 50recipes (digital type) 20steps, 20recipes (digital type)
Bowl size 8", P.P
Acceleration / Deceleration rate Variable Variable
Chuck material Anodized AL, Acetal Anodized AL
Electric power 220V, 5A 220V, 5A
Oiless vacuum pump pressure -650mmHg
Dimensions(mm) 224(W)x267(D)x183(H) 650(W) x 945(D) x 1200(H)
Oilless vacuum pump pressure -650mmHg
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