Product
| Type | Spin coater system | Spin coater system | Spin coater system | Spin system | Spin coater system |
| Substrate size | piece ~ up to 6" circle | piece ~ up to 8" circle | piece ~ up to 12" circle / 500x500mm | piece ~ up to 4" circle | piece ~ up to 8" circle |
| Rotation speed | 300 ~ 7,000rpm(@without load) an error of less than 3% DC Servo Motor |
300 ~ 7,000rpm(@without load) an error of less than 1% AC Servo Motor |
300 ~ 5,000rpm / ~ 2,000rpm (@without load), Error rate ≤1% AC Servo Motor |
300 ~ 7,000rpm(@without load) an error of less than 3% DC Servo Motor |
300 ~ 7,000rpm(@without load) an error of less than 1% DC Servo Motor |
| Spin state | 50steps, 20recipes (digital type) | 50steps, 20recipes (digital type) | 50steps, 20recipes (digital type) | 50steps, 50recipes (digital type) | 50steps, 20recipes (digital type) |
| Bowl size | 12", Stainless steel | 12", Stainless steel | • | 8", P.P | 12", Stainless steel |
| Acceleration / Deceleration rate | Variable | Variable | Variable | Variable | Variable |
| Chuck material | Anodized AL, Acetal | Anodized AL, Acetal | Anodized AL, Acetal | Anodized AL, Acetal | Anodized AL, Acetal |
| Electric power | 220V, 5A | 220V, 5A | 220V, 5A / 10A | 220V, 5A | 220V, 5A |
| Oiless vacuum pump pressure | -650mmHg | -650mmHg | • | -650mmHg | 650mmHg |
| Dimensions(mm) | 390(W)x570(D)x280(H) | 390(W)x570(D)x400(H) | Customized | 230(W)x340(D)x260(H) | • |
| Bowl | • | • | Stainless steel / Stainless steel, Chuck cover type | • | • |
| Oilless vacuum pump pressure | • | • | -650mmHg | • | • |
| Options | • | • | Number of Dispenser nozzle Type of chemical Drain type etc. |
• | Number of Dispenser nozzle Type of chemical Drain type etc. |
| Option | • | • | • | Separated Controller | • |