Spin-1200T	Spin-3000T	UV LAMP	Intensity meter	MINILAB
Type	Spin system	Spin coater system	MIDAS-350W	•	•
Substrate size	piece ~ up to 4" circle	piece ~ up to 8" circle	•	•	•
Rotation speed	300 ~ 7,000rpm(@without load) an error of less than 3% DC Servo Motor	300 ~ 7,000rpm(@without load) an error of less than 1% DC Servo Motor	•	•	•
Spin state	50steps, 50recipes (digital type)	50steps, 20recipes (digital type)	•	•	•
Bowl size	8", P.P	12", Stainless steel	•	•	•
Acceleration / Deceleration rate	Variable	Variable	•	•	•
Chuck material	Anodized AL, Acetal	Anodized AL, Acetal	•	•	•
Electric power	220V, 5A	220V, 5A	•	•	•
Oiless vacuum pump pressure	-650mmHg	650mmHg	•	•	•
Dimensions(mm)	230(W)x340(D)x260(H)	•	•	•	•
Option	Separated Controller	•	•	•	•
Options	•	Number of Dispenser nozzle Type of chemical Drain type etc.	•	•	•
측정파장	•	•	•	365 nm (UV I-Line)	•
측정가능 Intensity	•	•	•	0 ~98.9mW/㎠	•
Dimension(mm)	•	•	•	150 X 80 X 45	•
Composition	•	•	•	•	Spin Coater, Hot plate, D.I water system
Dimesion(mm)	•	•	•	•	1000(W) x 560(D) x 1630(H)
etc.	•	•	•	•	Drain line Drain tank exhaust N2 gun DI water gun