Product

Spin-1200T

Spin-1200T

Spin-3000T

Spin-3000T

UV LAMP

UV LAMP

Intensity meter

Intensity meter

MINILAB

MINILAB

Type Spin system Spin coater system MIDAS-350W
Substrate size piece ~ up to 4" circle piece ~ up to 8" circle
Rotation speed 300 ~ 7,000rpm(@without load) an error of less than 3%
DC Servo Motor
300 ~ 7,000rpm(@without load) an error of less than 1%
DC Servo Motor
Spin state 50steps, 50recipes (digital type) 50steps, 20recipes (digital type)
Bowl size 8", P.P 12", Stainless steel
Acceleration / Deceleration rate Variable Variable
Chuck material Anodized AL, Acetal Anodized AL, Acetal
Electric power 220V, 5A 220V, 5A
Oiless vacuum pump pressure -650mmHg 650mmHg
Dimensions(mm) 230(W)x340(D)x260(H)
Option Separated Controller
Options Number of Dispenser nozzle
Type of chemical
Drain type
etc.
측정파장 365 nm (UV I-Line)
측정가능 Intensity 0 ~98.9mW/㎠
Dimension(mm) 150 X 80 X 45
Composition Spin Coater, Hot plate, D.I water system
Dimesion(mm) 1000(W) x 560(D) x 1630(H)
etc. Drain line
Drain tank
exhaust
N2 gun
DI water gun
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