|
 Spin-1200T |
 Spin-3000T |
 UV LAMP |
 Intensity meter |
 MINILAB |
Type |
Spin system |
Spin coater system |
MIDAS-350W |
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Substrate size |
piece ~ up to 4" circle |
piece ~ up to 8" circle |
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Rotation speed |
300 ~ 7,000rpm(@without load) an error of less than 3% DC Servo Motor |
300 ~ 7,000rpm(@without load) an error of less than 1% DC Servo Motor |
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Spin state |
50steps, 50recipes (digital type) |
50steps, 20recipes (digital type) |
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Bowl size |
8", P.P |
12", Stainless steel |
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Acceleration / Deceleration rate |
Variable |
Variable |
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Chuck material |
Anodized AL, Acetal |
Anodized AL, Acetal |
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Electric power |
220V, 5A |
220V, 5A |
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Oiless vacuum pump pressure |
-650mmHg |
650mmHg |
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Dimensions(mm) |
230(W)x340(D)x260(H) |
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Option |
Separated Controller |
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Options |
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Number of Dispenser nozzle Type of chemical Drain type etc. |
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측정파장 |
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365 nm (UV I-Line) |
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측정가능 Intensity |
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0 ~98.9mW/㎠ |
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Dimension(mm) |
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150 X 80 X 45 |
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Composition |
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Spin Coater, Hot plate, D.I water system |
Dimesion(mm) |
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1000(W) x 560(D) x 1630(H) |
etc. |
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Drain line Drain tank exhaust N2 gun DI water gun |