Product

Spin-3000T

Spin-3000T

UV LAMP

UV LAMP

Intensity meter

Intensity meter

MINILAB

MINILAB

Type Spin coater system MIDAS-350W
Substrate size piece ~ up to 8" circle
Rotation speed 300 ~ 7,000rpm(@without load) an error of less than 1%
DC Servo Motor
Spin state 50steps, 20recipes (digital type)
Bowl size 12", Stainless steel
Acceleration / Deceleration rate Variable
Chuck material Anodized AL, Acetal
Electric power 220V, 5A
Oiless vacuum pump pressure 650mmHg
Options Number of Dispenser nozzle
Type of chemical
Drain type
etc.
측정파장 365 nm (UV I-Line)
측정가능 Intensity 0 ~98.9mW/㎠
Dimension(mm) 150 X 80 X 45
Composition Spin Coater, Hot plate, D.I water system
Dimesion(mm) 1000(W) x 560(D) x 1630(H)
etc. Drain line
Drain tank
exhaust
N2 gun
DI water gun
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